NanoFab

Tools requiring scheduling:

Please note, all scheduling is now conducted through iLab. If you do not have an iLab account, please create one at asu.corefacilities.org. Once you have an iLab account, schedule tool use at the iLab NanoFab site.

Lithography

  • EVG 620 wafer aligner
  • OAI 808
  • EBL
  • GCA Stepper
  • Brewer Science Cee Coater #1
  • Brewer Science Cee Coater #2

Metal and Dielectric Deposition

  • CHA 600-SE electron beam evaporator
  • Edwards thermal evaporator
  • Lesker #1 PVD75 sputter magnetron
  • Lesker #3 PVD electron beam evaporator
  •  Lesker #4 PVD75 electron beam evaporator
  • Oxford PECVD
  • Cambridge ALD
  • PlasmaQuest 333 RPCVD
  • SCS Parylene Coater

Etch

  • Oxford Instruments Plasmalab 80+ (C1)
  • Oxford Instruments Plasmalab 80+ (F)
  • PlasmaTherm 790 Fluorine based RIE
  • STS all general etch
  • STS advanced silicon etch
  • Xactix e-1 XeF2 etcher
  • Apex

Metrology and Electrical Measurements

  • High Temperature Probe Station
  • Hitachi S4700 Field Emission Scanning Electron Microscope

Miscellaneous

  • RCA clean wet bench
  • AS-One RTP

Capabilities that require staff assistance:

  • Diffusion
  • Boron dope
  • Oxidation
  • High Temperature anneal
  • Silicon Nitride
  • Phosphorus doping
  • Polysilicon