NanoFab

Electron Beam Lithography

Electron Beam Lithography

Electron Beam Lithography (EBL)

(JOEL, 25nm resolution, mask design, write times, PR recommendations)

Overview

Training?

Service request?

Questions? Contact?

JOEL model #

(Link to operating manual)

Tool capability

Feature size

Mask Design and formats

Alignment keys

Overlay

Write areas and times

Process Details: E-beam resists

Combo Processes (optical and E-beam)

Skills

Posted on

February 17, 2015