NanoFab

ASU Students and Faculty

For ASU faculty and students looking to begin their projects with ASU NanoFab, either have your advisor go directly to the new user entry portal and fill out the project initiation sheet found on this web site at [training – student – add], or fill out the get started form below. A staff member will then contact you and walk your advisor through the process.

Once you have received word that your project initiation form has been received, you need to:

  1. Go to ERC 117 and sign up for the NanoFAB distribution list in order to receive pertinent emails. Print a copy of the Safety – Handbook (needed for the safety class).
  2. Take the cleanroom safety class and test. A score of 80% or better is required to pass the test. The class is usually offered the last week of every month. A sign up is available on the board outside ERC 144 the week before class.
  3. Once you pass the Safety course, the next step is to go thru the “Orientation” and “Wet Benches” modules which must be taken before any tool training.   A NanoFAB staff member will contact you to schedule Orientation after you have entered a training request.
  4. Upon completion of these two modules, a request should be made by you to have nanofab computer access be added to your profile.

You now have access to training and use of the cleanroom.

  1. Request for additional tool training is also initiated using the training request . You may sign up for training on 3 tools concurrently. Tool training is not instantaneous, as it is offered on a first come first serve basis. Please know that some tools take considerable time to operate proficently.
  2. Obtain a cleanroom note book from the Lab Stores. Be sure to check that it has clean room paper. You must obtain an account number from your advisor to pay for it.
  3. If you are designing a mask, you will need to be proficient in a CAD program prior to starting the circuit design. The program must be able to output files in .dxf or .gdsII format. If you need to make your own masks, there are additional steps to follow. For more information, contact Kevin Nordquist.
  4. Training times are specific and will be cancelled if you are late.
  5. NanoFAB staff are here to assist you and answer further questions about the cleanroom.

Some steps will require an ASURITE ID.

The sequence for training is generally as follows:

  1. Orientation
  2. Wet benches
  3. Metrology Suite (Woollam SE, Filmetrics F-20 and F-40, DekTak Profilometer, alpha step profilometer, Zygo optical profilometer, Veeco 4-point probe)*
  4. Spinner training
  5. Lithography exposure tools (Suss and/or EV620)
  6. Etching/Plasma tools (RIE or wet etch)
  7. Metal deposition

The specific tools are determined by the particular process you are running. This sequence is generic, but a good general guideline. There are a range of additional process tools in the cleanroom, which may require additional training programs.

NOTE: Training must be rescheduled if you are 15 minutes late or more, and your account will be billed.

Get Started with NanoFab

If you would like to initiate an interaction, fill out this short form by clicking the
“go to form” button.

Go to form

Submission of the new user form opens a file for your project and notifies the ASU Associate Director of the NanoFab and the ASU Director of the NNCI.

What's the Cost?

View rates associated with our various processes.

View Academic Rates