NanoFab

Academic Rates

Facility

Cleanroom access – Two-tier fee structure: The first 20 hours are charged at $45/hr – anything above 20 hours is charged at $15/hr

There is no tool charge for individuals accessing the Cleanroom. Tools are charged under service requests.

 

Staff Support – $55/hr

 

CMOS tubes

Tempress 4-stack furnace tubes – $100 per standard run (additional fees for non-standard)

Tystar Mini-Tytan 4600 4-stack furnace tubes – $100 per standard run (additional fees for non-standard)

 

Lithography

EVG 620 Front and Backside Aligner – $30/hr

JEOL JBX-6000FS/E Electron Beam Lithography System – $50/hr – individual capped at $800 per month – group capped at $1,600 per month

OAI 808 – $25/hr

GCA 8500 stepper – $35/hr

 

Metal Deposition

CHA 600-SE Electron Beam Evaporator – $15/hr

Edwards Auto306 Thermal Evaporator – $15/hr

Lesker PVD75 Sputter Magnetron – $25/hr

Lesker PVD75 Zinc Oxide Sputterer – $25/hr

Lesker PVD75 Electron Beam Evaporator – $25/hr

 

Metrology

Woollam Ellipsometer – included in cleanroom access fee

Filmetrics F20 – included in cleanroom access fee

Filmetrics F40 – included in cleanroom access fee

Hitachi S4700 Field Emission Scanning Electron Microscope – $35/hr

Axiophot Photomicroscope – included in cleanroom access fee

Zygo Zegauge – included in cleanroom access fee

High Temperature Probe Station – $5/hr minimum of one hour

MDC Capacitance-Voltage System – included in cleanroom access fee

 

Plasma Enhanced Chemical Vapor Deposition

PlasmaQuest 333 RPCVD – $20/hr

Oxford PECVD 100 – $35/hr

 

Rapid Thermal Annealing

Tamarack 180M – $25/hr or $10/run

Heat Pulse 610 RTP – $25/hr or $10/run

 

Reactive Ion Etching

STS ICP Advanced Silicon Etch (ASE) – $40/hr

STS ICP All General Etch (AGE) – $40/hr

Tegal PlasmaLine 411 Plasma Asher – included in cleanroom access fee

Oxford Instruments Plasmalab 80+ RIE (Cl) – $25/hr

Oxford Instruments Plasmalab 80+ RIE (F) – $25/hr

Xactix XeF2 Etcher – $25/hr

RIE2 Etch Oxford – $25/hr

 

Other Tools

Parylene Coater – $30/run up to 8 hours

Supercritical CO2 Cleaner Tousimis – $15/run