NanoFab

Industry Rates

Facility

Cleanroom access – $1200/day (pro-rated hourly)

 

CMOS tubes

Tempress 4-stack furnace tubes – negotiated on a case by case basis

Tystar Mini-Tytan 4600 4-stack furnace tubes – negotiated on a case by case basis

 

Staff Support – $100/hr

 

Lithography and Mask Making

EVG 620 Front and Backside Aligner – $75/hr

JEOL JBX-6000FS/E Electron Beam Lithography System – single access is $200/hour – though a project cost is negotiable on a case by case basis

OAI 808 – $75/hr

 

Metal Deposition

CHA 600-SE Electron Beam Evaporator – $75/hr

Edwards Auto306 Thermal Evaporator – $75/hr

Lesker PVD75 Sputter Magnetron – $75/hr

Lesker PVD75 Zinc Oxide Sputterer – $75/hr

Lesker PVD75 Electron Beam Evaporator – $75/hr

Lesker PVD75 Electron Beam Evaporator – $75/hr

 

Metrology

Woollam Ellipsometer – included in cleanroom access fee

Filmetrics F20 – included in cleanroom access fee

Filmetrics F40 – included in cleanroom access fee

Hitachi S4700 Field Emission Scanning Electron Microscope – $350/hr

Axiophot Photomicroscope – included in cleanroom access fee

Zygo Zegauge – included in cleanroom access fee

High Temperature Probe Station – $40hr-$90/hr based on hours ($40/hr for >40 hrs)

MDC Capacitance-Voltage System – included in cleanroom access fee

 

Plasma Enhanced Chemical Vapor Deposition

PlasmaQuest 333 RPCVD – $75/hr

Oxford PECVD 100 – $75/hr

 

Rapid Thermal Annealing

Tamarack 180M – $75/hr

Heat Pulse 610 RTP – $75/hr

 

Reactive Ion Etching

STS ICP Advanced Silicon Etch (ASE) – $200/hr

STS ICP All General Etch (AGE) – $200/hr

Tegal PlasmaLine 411 Plasma Asher – included in cleanroom access fee

Oxford Instruments Plasmalab 80+ RIE (Cl) – $75/hr

Oxford Instruments Plasmalab 80+ RIE (F) – $75/hr

Xactix XeF2 Etcher – $75/hr

RIE2 Etch Oxford – $75/hr

 

Other Tools

Parylene Coater – negotiated on a case by case basis

Supercritical CO2 Cleaner Tousimis – negotiated on a case by case basis